1000+/- Reticle Stocker
This Reticle Stocker is designed to hold over 1000 individual parts. It is configured to be a class 10 environment. Air flow not only purges the air in the storage space but moves all the reticles past the clean air source while retrieving reticles. This machine has a manual load port with clean shower. The operator can visually inspect any reticle and bathe it in a cleaning shower if required. The operating system is completely automated to place the reticle in an open slot or the operator can manually select a location. Likewise the operator can retrieve a reticle or through factory automation. The system can also be fitted with an automatic conveyor to suit the factory transfer system to and from the Stepper.
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