Quoted Projects

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Hi-tech Cv

Ultra-thin Wafer Head

Wafer Handlers

Global Mektronics Inc

+01 602-464-3487

Arizona, USA

Quoted Projects

Turnkey Projects

Previously Quoted Projects

The Project:

1000+ Reticle Stocker

500+ Reticle Stocker

The customer required a stocker that could automatically store and retrieve a minimum of 1000 reticles. The environment within the stocker had to be within 100 microns. Its footprint had to be as small as possible and fit within the existing room near the stepper.

Additional requirements were:

· * A self loading and unloading Foup station.
* The system had to be convertable to automated Foup transferring at a later date.
* An additional requirement was the presence of a manual visual inspection and air wash station within the system.

An optional design was presented for two 500+ stockers with floor prints small enough to be located in very small locations, yet have most of the features of the larger version.